Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6911283 | Method and apparatus for coupling a pellicle to a photomask using a non-distorting mechanism | Joseph Gordon, Franklin D. Kalk, Hakki Ufuk Alpay, Glenn E. Storm | 2005-06-28 |
| 6850858 | Method and apparatus for calibrating a metrology tool | Craig West, Kent B. Ibsen | 2005-02-01 |
| 6841309 | Damage resistant photomask construction | H. Ufuk Alpay, Joseph Gordon, Franklin D. Kalk | 2005-01-11 |