Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6911283 | Method and apparatus for coupling a pellicle to a photomask using a non-distorting mechanism | Joseph Gordon, Gregory P. Hughes, Franklin D. Kalk, Glenn E. Storm | 2005-06-28 |