Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6962471 | Substrate conveying module and system made up of substrate conveying module and workstation | Andreas Birkner, Knut Hiltawski, Karsten Urban | 2005-11-08 |
| 6941009 | Method for evaluating pattern defects on a water surface | — | 2005-09-06 |
| 6918735 | Holding device for wafers | Karsten Urban, Winfried Deutscher | 2005-07-19 |
| 6920249 | Method and measuring instrument for determining the position of an edge of a pattern element on a substrate | Klaus Rinn, Wolfgang Fricke | 2005-07-19 |