Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6962471 | Substrate conveying module and system made up of substrate conveying module and workstation | Andreas Birkner, Karsten Urban, Joachim Wienecke | 2005-11-08 |
| 6845174 | Arrangement and method for the identification of substrates | Dominik Grau, Andreas Birkner, Frank Bernhardt | 2005-01-18 |