Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6962471 | Substrate conveying module and system made up of substrate conveying module and workstation | Andreas Birkner, Knut Hiltawski, Joachim Wienecke | 2005-11-08 |
| 6918735 | Holding device for wafers | Winfried Deutscher, Joachim Wienecke | 2005-07-19 |