Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6920249 | Method and measuring instrument for determining the position of an edge of a pattern element on a substrate | Klaus Rinn, Joachim Wienecke | 2005-07-19 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6920249 | Method and measuring instrument for determining the position of an edge of a pattern element on a substrate | Klaus Rinn, Joachim Wienecke | 2005-07-19 |