Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6972421 | Extreme ultraviolet light source | Stephan T. Melnychuk, William N. Partlo, Igor V. Fomenkov, I. Roger Oliver, Richard M. Ness +7 more | 2005-12-06 |
| 6937635 | High rep-rate laser with improved electrodes | Richard G. Morton, Thomas D. Steiger, Richard C. Ujazdowski, Tom A. Watson, Bryan Moosman +3 more | 2005-08-30 |