Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6972421 | Extreme ultraviolet light source | Stephan T. Melnychuk, William N. Partlo, I. Roger Oliver, Richard M. Ness, Norbert Bowering +7 more | 2005-12-06 |
| 6882674 | Four KHz gas discharge laser system | Christian J. Wittak, William N. Partlo, Richard L. Sandstrom, Paul C. Melcher, David M. Johns +19 more | 2005-04-19 |
| 6853653 | Laser spectral engineering for lithographic process | Ronald Spangler, Jacob Lipcon, John Allen Rule, Robert N. Jacques, Armen Kroyan +2 more | 2005-02-08 |