Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6972421 | Extreme ultraviolet light source | Stephan T. Melnychuk, William N. Partlo, Igor V. Fomenkov, I. Roger Oliver, Norbert Bowering +7 more | 2005-12-06 |
| 6914919 | Six to ten KHz, or greater gas discharge laser system | Tom A. Watson, Richard C. Ujazdowski, Alex P. Ivaschenko, Richard L. Sandstrom, Robert A. Shannon +6 more | 2005-07-05 |
| 6882674 | Four KHz gas discharge laser system | Christian J. Wittak, William N. Partlo, Richard L. Sandstrom, Paul C. Melcher, David M. Johns +19 more | 2005-04-19 |
| 6865210 | Timing control for two-chamber gas discharge laser system | Alexander I. Ershov | 2005-03-08 |