Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6972421 | Extreme ultraviolet light source | Stephan T. Melnychuk, Igor V. Fomenkov, I. Roger Oliver, Richard M. Ness, Norbert Bowering +7 more | 2005-12-06 |
| 6882674 | Four KHz gas discharge laser system | Christian J. Wittak, Richard L. Sandstrom, Paul C. Melcher, David M. Johns, Robert B. Saethre +19 more | 2005-04-19 |