Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6955976 | Method for dicing wafer stacks to provide access to interior structures | Peter Hartwell, Storrs T. Hoen, Jonah A. Harley | 2005-10-18 |
| 6933873 | PWM-based measurement interface for a micro-machined electrostatic actuator | Robert Conant, William A. Clark | 2005-08-23 |
| 6930368 | MEMS having a three-wafer structure | Peter Hartwell, Storrs T. Hoen, Chung Ching Yang, Paul Merchant, Carl Taussig | 2005-08-16 |