Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6930368 | MEMS having a three-wafer structure | Peter Hartwell, Storrs T. Hoen, David Horsley, Chung Ching Yang, Carl Taussig | 2005-08-16 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6930368 | MEMS having a three-wafer structure | Peter Hartwell, Storrs T. Hoen, David Horsley, Chung Ching Yang, Carl Taussig | 2005-08-16 |