Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6955976 | Method for dicing wafer stacks to provide access to interior structures | David Horsley, Storrs T. Hoen, Jonah A. Harley | 2005-10-18 |
| 6953704 | Systems with high density packing of micromachines | Robert G. Walmsley | 2005-10-11 |
| 6930368 | MEMS having a three-wafer structure | Storrs T. Hoen, David Horsley, Chung Ching Yang, Paul Merchant, Carl Taussig | 2005-08-16 |