Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6960488 | Method of fabricating a microfabricated high aspect ratio device with electrical isolation | Timothy J. Brosnihan, James Bustillo | 2005-11-01 |
| 6933873 | PWM-based measurement interface for a micro-machined electrostatic actuator | David Horsley, Robert Conant | 2005-08-23 |
| 6868726 | Position sensing with improved linearity | Mark Alan Lemkin, Thor Juneau, Allen W. Roessig | 2005-03-22 |