SU

Stephan Uhlemann

CG Carl Zeiss Smt Gmbh: 1 patents #28 of 81Top 35%
Overall (2005): #96,380 of 245,428Top 40%
1
Patents 2005

Issued Patents 2005

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6903337 Examining system for the particle-optical imaging of an object, deflector for charged particles as well as method for the operation of the same Oliver Kienzle, Dirk Stenkamp, Michael Steigerwald, Rainer Knippelmeyer, Max Haider +1 more 2005-06-07