Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6903337 | Examining system for the particle-optical imaging of an object, deflector for charged particles as well as method for the operation of the same | Oliver Kienzle, Dirk Stenkamp, Michael Steigerwald, Rainer Knippelmeyer, Heiko Müller +1 more | 2005-06-07 |