Issued Patents 2005
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6967328 | Method for the electron-microscopic observation of a semiconductor arrangement and apparatus therefor | Oliver Kienzle, Ingo Muller | 2005-11-22 |
| 6946657 | Electron microscopy system | Oliver Kienzle, Heiko Müller | 2005-09-20 |
| 6914249 | Particle-optical apparatus, electron microscopy system and electron lithography system | Oliver Kienzle | 2005-07-05 |
| 6903337 | Examining system for the particle-optical imaging of an object, deflector for charged particles as well as method for the operation of the same | Oliver Kienzle, Dirk Stenkamp, Michael Steigerwald, Max Haider, Heiko Müller +1 more | 2005-06-07 |
| 6891168 | Particle-optical apparatus and method for operating the same | — | 2005-05-10 |
| 6878936 | Applications operating with beams of charged particles | Oliver Kienzle | 2005-04-12 |