Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6872956 | Particle beam device with a particle source to be operated in high vacuum and cascade-type pump arrangement for such a particle beam device | Volker Drexel | 2005-03-29 |
| 6855938 | Objective lens for an electron microscopy system and electron microscopy system | Dirk Preikszas, Michael Steigerwald, Peter Hoffrogge | 2005-02-15 |