Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6872956 | Particle beam device with a particle source to be operated in high vacuum and cascade-type pump arrangement for such a particle beam device | Peter Gnauck | 2005-03-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6872956 | Particle beam device with a particle source to be operated in high vacuum and cascade-type pump arrangement for such a particle beam device | Peter Gnauck | 2005-03-29 |