Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6855938 | Objective lens for an electron microscopy system and electron microscopy system | Michael Steigerwald, Peter Hoffrogge, Peter Gnauck | 2005-02-15 |
| 6855939 | Particle beam system having a mirror corrector | Harald Rose, Peter Hartel | 2005-02-15 |