Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6900510 | MEMS devices and methods for inhibiting errant motion of MEMS components | Matthew J. Neal, Alan L. Sidman, Jiang Zhe | 2005-05-31 |
| 6858911 | MEMS actuators | Matthew J. Neal, Justin C. Borski, Alan L. Sidman | 2005-02-22 |
| 6856749 | Optical coupling and alignment device | Michikazu Kosuge | 2005-02-15 |