Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6900510 | MEMS devices and methods for inhibiting errant motion of MEMS components | Hirokazu Tamura, Matthew J. Neal, Jiang Zhe | 2005-05-31 |
| 6858911 | MEMS actuators | Hirokazu Tamura, Matthew J. Neal, Justin C. Borski | 2005-02-22 |