Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6858911 | MEMS actuators | Hirokazu Tamura, Matthew J. Neal, Alan L. Sidman | 2005-02-22 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6858911 | MEMS actuators | Hirokazu Tamura, Matthew J. Neal, Alan L. Sidman | 2005-02-22 |