Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6900510 | MEMS devices and methods for inhibiting errant motion of MEMS components | Hirokazu Tamura, Matthew J. Neal, Alan L. Sidman | 2005-05-31 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6900510 | MEMS devices and methods for inhibiting errant motion of MEMS components | Hirokazu Tamura, Matthew J. Neal, Alan L. Sidman | 2005-05-31 |