Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6867140 | Method of polishing a multi-layer substrate | Shumin Wang, Vlasta Brusic Kaufman, Steven Grumbine | 2005-03-15 |
| 6855266 | Polishing system with stopping compound and method of its use | Shumin Wang, Vlasta Brusic Kaufman, Steven Grumbine | 2005-02-15 |
| 6852632 | Method of polishing a multi-layer substrate | Shumin Wang, Vlasta Brusic Kaufman, Steven Grumbine, Renjie Zhou | 2005-02-08 |
| 6841479 | Method of reducing in-trench smearing during polishing | Paul M. Feeney, Kevin Moeggenborg | 2005-01-11 |