Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6974777 | CMP compositions for low-k dielectric materials | Homer Chou, Joseph Hawkins, Jeffrey P. Chamberlain | 2005-12-13 |
| 6936543 | CMP method utilizing amphiphilic nonionic surfactants | David Schroeder, Homer Chou, Jeffrey P. Chamberlain, Joseph Hawkins, Phillip W. Carter | 2005-08-30 |
| 6841479 | Method of reducing in-trench smearing during polishing | Isaac K. Cherian, Paul M. Feeney | 2005-01-11 |