Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6852632 | Method of polishing a multi-layer substrate | Shumin Wang, Vlasta Brusic Kaufman, Steven Grumbine, Isaac K. Cherian | 2005-02-08 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6852632 | Method of polishing a multi-layer substrate | Shumin Wang, Vlasta Brusic Kaufman, Steven Grumbine, Isaac K. Cherian | 2005-02-08 |