Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6867140 | Method of polishing a multi-layer substrate | Shumin Wang, Steven Grumbine, Isaac K. Cherian | 2005-03-15 |
| 6855266 | Polishing system with stopping compound and method of its use | Shumin Wang, Steven Grumbine, Isaac K. Cherian | 2005-02-15 |
| 6852632 | Method of polishing a multi-layer substrate | Shumin Wang, Steven Grumbine, Isaac K. Cherian, Renjie Zhou | 2005-02-08 |
| 6840971 | Chemical mechanical polishing systems and methods for their use | Shumin Wang | 2005-01-11 |