Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6916744 | Method and apparatus for planarization of a material by growing a sacrificial film with customized thickness profile | Juan Chacin, Hali Forstner | 2005-07-12 |
| 6888104 | Thermally matched support ring for substrate processing chamber | Joseph M. Ranish, Aaron Muir Hunter, Balasubramanian Ramachandran, Jallepally Ravi, Sundar Ramamurthy +1 more | 2005-05-03 |