Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6888104 | Thermally matched support ring for substrate processing chamber | Joseph M. Ranish, Balasubramanian Ramachandran, Jallepally Ravi, Sundar Ramamurthy, Vedapuram S. Achutharaman +1 more | 2005-05-03 |
| 6839507 | Black reflector plate | Bruce E. Adams | 2005-01-04 |