Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6888104 | Thermally matched support ring for substrate processing chamber | Joseph M. Ranish, Aaron Muir Hunter, Balasubramanian Ramachandran, Sundar Ramamurthy, Vedapuram S. Achutharaman +1 more | 2005-05-03 |