Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6897131 | Advances in spike anneal processes for ultra shallow junctions | Balasubramanian Ramachandran, Ravi Jallepally, Ryan Boas, Amir Al-Bayati, Houda Graoui +1 more | 2005-05-24 |
| 6888104 | Thermally matched support ring for substrate processing chamber | Joseph M. Ranish, Aaron Muir Hunter, Balasubramanian Ramachandran, Jallepally Ravi, Vedapuram S. Achutharaman +1 more | 2005-05-03 |