Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6949203 | System level in-situ integrated dielectric etch process particularly useful for copper dual damascene | Diana Xiaobing Ma, Brian Sy-Yuan Shieh, Gerald Yin, Jennifer Y. Sun, Senh Thach +2 more | 2005-09-27 |
| 6905968 | Process for selectively etching dielectric layers | Jie Yuan, Hui Chen, Theodoros Panagopoulos, Yan Ye | 2005-06-14 |
| 6897154 | Selective etching of low-k dielectrics | Terry Leung, Qiqun Zheng, Yan Ye, Takehiko Komatsu | 2005-05-24 |