Issued Patents 2004
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6827973 | Substrate processing method | — | 2004-12-07 |
| 6808567 | Gas treatment apparatus | Kazuhiro Takeshita, Yoji Mizutani, Kyoshige Katayama | 2004-10-26 |
| 6786974 | Insulating film forming method and insulating film forming apparatus | Takayuki Komiya, Shigeyoshi Kojima | 2004-09-07 |
| 6730620 | Substrate processing method and substrate processing apparatus | Kei Miyazaki, Yuichiro Uchihama, Kenji Yasuda, Kiminari Sakaguchi | 2004-05-04 |
| 6726775 | Method of coating film, coating unit, aging unit, solvent replacement unit, and apparatus for coating film | Kazuhiro Takeshita, Makoto Muramatsu, Yoji Mizutani, Kazutoshi Yano, Kyoshige Katayama | 2004-04-27 |
| 6673155 | Apparatus for forming coating film and apparatus for curing the coating film | Hiroyuki Miyamoto, Shizuo Ogawa, Shinji Koga | 2004-01-06 |