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Makoto Muramatsu

TL Tokyo Electron Limited: 1 patents #120 of 414Top 30%
Overall (2004): #160,705 of 270,089Top 60%
1
Patents 2004

Issued Patents 2004

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6726775 Method of coating film, coating unit, aging unit, solvent replacement unit, and apparatus for coating film Kazuhiro Takeshita, Shinji Nagashima, Yoji Mizutani, Kazutoshi Yano, Kyoshige Katayama 2004-04-27