YM

Yoji Mizutani

TL Tokyo Electron Limited: 2 patents #53 of 414Top 15%
Overall (2004): #33,647 of 270,089Top 15%
2
Patents 2004

Issued Patents 2004

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
6808567 Gas treatment apparatus Kazuhiro Takeshita, Shinji Nagashima, Kyoshige Katayama 2004-10-26
6726775 Method of coating film, coating unit, aging unit, solvent replacement unit, and apparatus for coating film Kazuhiro Takeshita, Shinji Nagashima, Makoto Muramatsu, Kazutoshi Yano, Kyoshige Katayama 2004-04-27