KY

Kazutoshi Yano

TL Tokyo Electron Limited: 1 patents #120 of 414Top 30%
Overall (2004): #179,709 of 270,089Top 70%
1
Patents 2004

Issued Patents 2004

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6726775 Method of coating film, coating unit, aging unit, solvent replacement unit, and apparatus for coating film Kazuhiro Takeshita, Shinji Nagashima, Makoto Muramatsu, Yoji Mizutani, Kyoshige Katayama 2004-04-27