SK

Shigeyoshi Kojima

TL Tokyo Electron Limited: 1 patents #120 of 414Top 30%
Overall (2004): #116,504 of 270,089Top 45%
1
Patents 2004

Issued Patents 2004

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6786974 Insulating film forming method and insulating film forming apparatus Takayuki Komiya, Shinji Nagashima 2004-09-07