Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6805135 | Cleaning fluid and cleaning method for component of semiconductor-treating apparatus | Kenichi Hirota, Hitoshi Yamada, Kiyoshi Yuasa, Eiji Yamaguchi, Shinichi Kawaguchi +1 more | 2004-10-19 |
| 6790289 | Method of cleaning a plasma processing apparatus | Taira Takase, Kouji Mitsuhashi, Hiroyuki Nakayama | 2004-09-14 |
| 6783863 | Plasma processing container internal member and production method thereof | Yoshio Harada, Junichi Takeuchi, Tatsuya Hamaguchi, Kouji Mitsuhashi | 2004-08-31 |