Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6805968 | Members for semiconductor manufacturing apparatus and method for producing the same | Yukimasa Saito, Hiroshi Sakurai, Kazumi Tani, Kiyoshi Miyajima, Takema Teratani | 2004-10-19 |
| 6783863 | Plasma processing container internal member and production method thereof | Yoshio Harada, Junichi Takeuchi, Nobuyuki Nagayama, Kouji Mitsuhashi | 2004-08-31 |