Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6807971 | Heat treatment apparatus and cleaning method of the same | Hitoshi Murata, Hiroyuki Yamamoto | 2004-10-26 |
| 6805968 | Members for semiconductor manufacturing apparatus and method for producing the same | Hiroshi Sakurai, Kazumi Tani, Kiyoshi Miyajima, Takema Teratani, Tatsuya Hamaguchi | 2004-10-19 |
| 6736636 | Thermal processor with gas supply | — | 2004-05-18 |