Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6783863 | Plasma processing container internal member and production method thereof | Yoshio Harada, Tatsuya Hamaguchi, Nobuyuki Nagayama, Kouji Mitsuhashi | 2004-08-31 |
| 6771483 | Electrostatic chuck member and method of producing the same | Yoshio Harada, Kenichiro Togoe | 2004-08-03 |
| 6703864 | Buffer circuit | Fumio Nakano | 2004-03-09 |