Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6818321 | High-temperature strength member | Masakazu Okazaki, Tatsuo Suidzu | 2004-11-16 |
| 6783863 | Plasma processing container internal member and production method thereof | Junichi Takeuchi, Tatsuya Hamaguchi, Nobuyuki Nagayama, Kouji Mitsuhashi | 2004-08-31 |
| 6771483 | Electrostatic chuck member and method of producing the same | Junichi Takeuchi, Kenichiro Togoe | 2004-08-03 |