Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6798519 | Method and apparatus for an improved optical window deposition shield in a plasma processing system | Shinya Nishimoto, Kouji Mitsuhashi, Hidehito Saigusa, Hiroyuki Nakayama | 2004-09-28 |
| 6790289 | Method of cleaning a plasma processing apparatus | Nobuyuki Nagayama, Kouji Mitsuhashi, Hiroyuki Nakayama | 2004-09-14 |