Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6798519 | Method and apparatus for an improved optical window deposition shield in a plasma processing system | Shinya Nishimoto, Kouji Mitsuhashi, Taira Takase, Hiroyuki Nakayama | 2004-09-28 |