Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6830702 | Single trench alternating phase shift mask fabrication | Chang-Ming Dai, Chung-Hsing Chang, Chen-Hao Hsieh | 2004-12-14 |
| 6830853 | Chrome mask dry etching process to reduce loading effect and defects | Sheng-Chi Chin, Chung-Hsing Chang, Hsin-Chang Li | 2004-12-14 |
| 6720116 | Process flow and pellicle type for 157 nm mask making | Anthony Yen, Chung-Hsing Chang, Chen-Hao Hsieh | 2004-04-13 |