Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6830702 | Single trench alternating phase shift mask fabrication | San-De Tzu, Chang-Ming Dai, Chung-Hsing Chang | 2004-12-14 |
| 6720116 | Process flow and pellicle type for 157 nm mask making | San-De Tzu, Anthony Yen, Chung-Hsing Chang | 2004-04-13 |