Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6830702 | Single trench alternating phase shift mask fabrication | San-De Tzu, Chung-Hsing Chang, Chen-Hao Hsieh | 2004-12-14 |
| 6711732 | Full sized scattering bar alt-PSM technique for IC manufacturing in sub-resolution era | Chung-Hsing Chang, Jan-Wen You, Burn Jeng Lin | 2004-03-23 |