Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6788477 | Apparatus for method for immersion lithography | — | 2004-09-07 |
| 6777143 | Multiple mask step and scan aligner | — | 2004-08-17 |
| 6711732 | Full sized scattering bar alt-PSM technique for IC manufacturing in sub-resolution era | Chang-Ming Dai, Chung-Hsing Chang, Jan-Wen You | 2004-03-23 |