SC

Sheng-Chi Chin

TSMC: 1 patents #234 of 898Top 30%
Overall (2004): #117,629 of 270,089Top 45%
1
Patents 2004

Issued Patents 2004

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6830853 Chrome mask dry etching process to reduce loading effect and defects San-De Tzu, Chung-Hsing Chang, Hsin-Chang Li 2004-12-14